In this paper, The brand new lapping slurry and sprucing slurry are released. As well as the deliquescence diploma of CLBO is fallen to least expensive. A completely new Doing work technology is likewise adopted. After rough sharpening, the focus of extremely-precision sharpening slurry is enhanced adequately. So does the extremely-precision sharpening pace, plus the wiping velocity is quicker than the deliquescence velocity. The CLBO crystal floor roughness can reach 1nm and continue to keep the floor quality nicely. Accessibility by means of your institution
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For instance, The existing concave OC could get replaced by a aircraft mirror which could mitigate the ability density within the surface area of M1 and also the diamond. Furthermore, utilizing high damage threshold coatings for M1 and diamond would also improve the output electric power with no damages. Then, the NIR laser at the 2nd Stokes wavelength may very well be higher plenty of, along with its superior beam top quality, to deliver the final DUV laser at 193 nm using a significant regular energy.
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Mainly because of the thermal lens influence inside the good-condition lasers, In the event the heating management is inadequate, It's not at all effortless to acquire the stable-state laser with a superior electrical power along with a substantial beam high quality concurrently. Recently, with the development of The skinny disk laser and one-crystal fiber (SCF) laser, a higher-electricity laser at the fundamental wavelength (1 μm) were understood with a good beam good quality In spite of a TEM00 manner beam [four,24], which might be excellent candidates for the elemental of the DUV laser generation. One more applicant for the basic would be the high-energy fiber laser which may be realized by coherent beam mix with M2 value less than one.
On the opposite aspect, the power scaling of your NIR laser is yet another factor to raise the common electrical power of the 193-nm DUV laser. Due to the deficiency of the large-power amplification Resolution from the NIR laser (such as at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) could be placed on create a wavelength converter by shifting the wavelength from one μm to the specified wavelength along with getting relative increased energy [21]. A short while ago, a diamond Raman laser showed its potential in accomplishing a higher electric power in addition to a high conversion efficiency in the 1st Stokes in the 1-μm laser [22,23], which suggests the possibility to get utilized while in the 193-nm DUV laser era on account of its substantial Raman achieve and huge frequency change.
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Within the scientific and industrial programs, the beam top quality in the DUV laser can also be a crucial parameter. Specifically, the beam high quality with the DUV laser dramatically has an effect on the laser machining results. The beam excellent on the DUV laser is decided by that of the fundamental laser as well as the crystal for that frequency conversion. Lately, a high-electric power DUV laser (>10 W) at 258 nm was claimed having a beam high-quality of M2 < 1.5, which was created by FHG of a Yb:YAG laser at 1030 nm using the CLBO crystal [thirteen]. This laser would bring about a better laser machining end result in comparison to the preceding DUV lasers with larger M2.
The heart beat length of the 2nd Stokes gentle was shortened to 5 ns as demonstrated in Figure 7a, only one-shot photo in the oscilloscope, which happens to be a typical phenomenon in Raman laser [forty four] although the heart beat duration with the pump laser was 10 ns.
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The beam profile shown in Figure 7b shown a very good beam top quality as on the list of deserves of Raman laser, which would be effective to produce a 193-nm DUV laser with a high quality beam.
Its UV absorption edge reaches a hundred and eighty nm. The helpful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about two times as huge as that of KDP. CLBO crystals may be developed within the stoichiometric soften with reduce viscosity.
The development on the 193-nm laser was shown by phases of SFG. So as to scale the DUV laser electrical power properly, a click here brand new concept on the 193-nm DUV laser generation is offered dependant on the diamond Raman laser.